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Articles (204)
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Amorphous ternary rare-earth gate oxides for future integration in MOSFETs

J.M.J. Lopes, E. Durğun Özben, M. Roeckerath, U. Littmark, R. Lupták, St. Lenk, M. Luysberg, A. Besmehn, U. Breuer, J. Schubert, S. Mantl

Journal:

Microelectronic Engineering

Année:

2009

Langue:

english

Fichier:

PDF, 538 KB

english, 2009

High mobility compressive strained Si0.5Ge0.5 quantum well p-MOSFETs with higher-k/metal-gate

W. Yu, B. Zhang, Q.T. Zhao, J.-M. Hartmann, D. Buca, A. Nichau, R. Lupták, J.M. Lopes, S. Lenk, M. Luysberg, K.K. Bourdelle, X. Wang, S. Mantl

Journal:

Solid-State Electronics

Année:

2011

Langue:

english

Fichier:

PDF, 415 KB

english, 2011

Effect of filament and substrate temperatures on the structural and electrical properties of SiC thin films grown by the HWCVD technique

A. Dasgupta, Y. Huang, L. Houben, S. Klein, F. Finger, R. Carius, M. Luysberg

Journal:

Thin Solid Films

Année:

2008

Langue:

english

Fichier:

PDF, 1.02 MB

english, 2008

LaLuO3 higher-κ dielectric integration in SOI MOSFETs with a gate-first process

A. Nichau, E. Durğun Özben, M. Schnee, J.M.J. Lopes, A. Besmehn, M. Luysberg, L. Knoll, S. Habicht, V. Mussmann, R. Luptak, St. Lenk, J. Rubio-Zuazo, G.R. Castro, D. Buca, Q.T. Zhao, J. Schubert, S. M

Journal:

Solid-State Electronics

Année:

2012

Langue:

english

Fichier:

PDF, 1.30 MB

english, 2012

Lasing in direct-bandgap GeSn alloy grown on Si

Wirths, S., Geiger, R., von den Driesch, N., Mussler, G., Stoica, T., Mantl, S., Ikonic, Z., Luysberg, M., Chiussi, S., Hartmann, J. M., Sigg, H., Faist, J., Buca, D., Grützmacher, D.

Journal:

Nature Photonics

Année:

2015

Langue:

english

Fichier:

PDF, 1.09 MB

english, 2015

ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Electrical and Structural Properties of Ternary Rare-Earth Oxides on Si and Higher Mobility Substrates and their Integration as High-k Gate Dielectrics in MOSFET Devices

Lopes, J. Marcelo, Durğun Özben, Eylem, Schnee, Michael, Luptak, Roman, Nichau, Alexander, Tiedemann, Andreas, Yu, Wenjie, Zhao, Qing-Tai, Besmehn, Astrid, Breuer, Uwe, Luysberg, Martina, Lenk, St.,

Année:

2011

Langue:

english

Fichier:

PDF, 1.34 MB

english, 2011

Opportunities for Chromatic Aberration Corrected High-Resolution Transmission Electron Microscopy, Lorentz Microscopy and Electron Holography of Magnetic Minerals

Dunin-Borkowski, R., Houben, L., Barthel, J., Thust, A., Luysberg, M., Chris, B.B., András, K., Kasama, T., Harrison, R.J., Jinschek, J.R.

Journal:

Microscopy and Microanalysis

Année:

2012

Langue:

english

Fichier:

PDF, 1.84 MB

english, 2012

(Invited) Failure Mechanisms in AlGaN/GaN HEMTs Irradiated with 2MeV Protons

Anderson, T. J., Koehler, A. D., Specht, P., Weaver, B. D., Greenlee, J. D., Tadjer, M. J., Hite, J. K., Mastro, M. A., Porter, M., Wade, M., Dubon, O., Luysberg, M., Hobart, K. D., Weatherford, T. R.

Journal:

ECS Transactions

Année:

2015

Langue:

english

Fichier:

PDF, 2.97 MB

english, 2015

Degradation mechanisms of 2 MeV proton irradiated AlGaN/GaN HEMTs

Greenlee, Jordan D., Specht, Petra, Anderson, Travis J., Koehler, Andrew D., Weaver, Bradley D., Luysberg, Martina, Dubon, Oscar D., Kub, Francis J., Weatherford, Todd R., Hobart, Karl D.

Journal:

Applied Physics Letters

Année:

2015

Langue:

english

Fichier:

PDF, 1.08 MB

english, 2015

Structural characterization of bulk and nanoparticle lead halide perovskite thin films by (S)TEM techniques

Fernández Delgado, Natalia, Herrera, Miriam, Delgado, Francisco, Tavabi, Amir Hossein, Luysberg, Martina, Dunin-Borkowski, Rafal E, Juarez-Perez, Emilio J, Clasen, Bruno, Mora-Sero, Ivan, Suarez, Isaa

Journal:

Nanotechnology

Année:

2019

Langue:

english

Fichier:

PDF, 715 KB

english, 2019

Defect formation during zinc diffusion into GaAs

M. Luysberg, W. Jäger, K. Urban, M. Schänzer, N.A. Stolwijk, H. Mehrer

Journal:

Materials Science and Engineering: B

Année:

1992

Langue:

english

Fichier:

PDF, 6.88 MB

english, 1992

Intermixing and charge neutrality at DyScO3/SrTiO3 interfaces

Martina Luysberg, Markus Heidelmann, Lothar Houben, Markus Boese, Tassilo Heeg, Jürgen Schubert, Martin Roeckerath

Journal:

Acta Materialia

Année:

2009

Langue:

english

Fichier:

PDF, 540 KB

english, 2009

Rare-earth scandate single- and multi-layer thin films as alternative gate oxides for microelectronic applications

T. Heeg, M. Wagner, J. Schubert, Ch. Buchal, M. Boese, M. Luysberg, E. Cicerrella, J.L. Freeouf

Journal:

Microelectronic Engineering

Année:

2005

Langue:

english

Fichier:

PDF, 642 KB

english, 2005

Strain relaxation in LT-GaAs by the agglomeration of As antisites

T.E.M. Staab, R.M. Nieminen, M. Luysberg, J. Gebauer, Th. Frauenheim

Journal:

Physica B: Condensed Matter

Année:

2003

Langue:

english

Fichier:

PDF, 315 KB

english, 2003

Microstructure of thick chromium–nitride coating synthesized using plasma assisted MOCVD technique

Arup Dasgupta, P. Antony Premkumar, Falix Lawrence, L. Houben, P. Kuppusami, M. Luysberg, K.S. Nagaraja, V.S. Raghunathan

Journal:

Surface and Coatings Technology

Année:

2006

Langue:

english

Fichier:

PDF, 452 KB

english, 2006

Microstructure of highly crystalline silicon carbide thin films grown by HWCVD technique

A. Dasgupta, S. Klein, L. Houben, R. Carius, F. Finger, M. Luysberg

Journal:

Thin Solid Films

Année:

2008

Langue:

english

Fichier:

PDF, 802 KB

english, 2008

Microcrystalline silicon carbide alloys prepared with HWCVD as highly transparent and conductive window layers for thin film solar cells

F. Finger, O. Astakhov, T. Bronger, R. Carius, T. Chen, A. Dasgupta, A. Gordijn, L. Houben, Y. Huang, S. Klein, M. Luysberg, H. Wang, L. Xiao

Journal:

Thin Solid Films

Année:

2009

Langue:

english

Fichier:

PDF, 1.05 MB

english, 2009

Quantitative atomic resolution mapping using high-angle annular dark field scanning transmission electron microscopy

S. Van Aert, J. Verbeeck, R. Erni, S. Bals, M. Luysberg, D. Van Dyck, G. Van Tendeloo

Journal:

Ultramicroscopy

Année:

2009

Langue:

english

Fichier:

PDF, 644 KB

english, 2009

High frequency n-type MODFETs on ultra-thin virtual SiGe substrates

T Hackbarth, H.-J Herzog, F Rinaldi, T Soares, B Holländer, S Mantl, M Luysberg, P.F.P Fichtner

Journal:

Solid-State Electronics

Année:

2003

Langue:

english

Fichier:

PDF, 201 KB

english, 2003

Direct compositional analysis of AlGaAs/GaAs heterostructures by the reciprocal space segmentation of high-resolution micrographs

K Tillmann, M Luysberg, P Specht, E.R Weber

Journal:

Ultramicroscopy

Année:

2002

Langue:

english

Fichier:

PDF, 1.17 MB

english, 2002

Carbon incorporation during growth of GaAs at low temperatures

J. Herfort, W. Ulrici, M. Moreno, M. Luysberg, K.H. Ploog

Journal:

Physica B: Condensed Matter

Année:

2001

Langue:

english

Fichier:

PDF, 111 KB

english, 2001

Incorporation and thermal stability of defects in highly p-conductive non-stoichiometric GaAs : Be

P. Specht, M.J. Cich, R. Zhao, J. Gebauer, M. Luysberg, E.R. Weber

Journal:

Physica B: Condensed Matter

Année:

2001

Langue:

english

Fichier:

PDF, 127 KB

english, 2001

On the dissociation of dislocations in InP

M. Luysberg, D. Gerthsen

Journal:

physica status solidi (a)

Année:

1994

Langue:

english

Fichier:

PDF, 1.56 MB

english, 1994

HRTEM investigation of the epitaxial growth of scandate/titanate multilayers

Markus Boese, Tassilo Heeg, Jürgen Schubert, Martina Luysberg

Journal:

Journal of Materials Science

Année:

2006

Langue:

english

Fichier:

PDF, 475 KB

english, 2006

Quantitative pressure and strain field analysis of helium precipitates in silicon

Norbert Hueging, Martina Luysberg, Helmut Trinkaus, Karsten Tillmann, Knut Urban

Journal:

Journal of Materials Science

Année:

2006

Langue:

english

Fichier:

PDF, 489 KB

english, 2006

Frontiers of Electron Microscopy in Materials Science 2005

Knut Urban, Joachim Mayer, Martina Luysberg, Karsten Tillmann

Journal:

Journal of Materials Science

Année:

2006

Fichier:

PDF, 1.41 MB

2006

Non-selective thin SiGe strain-relaxed buffer layers: Growth and carbon-induced relaxation

Matty Caymax, Romain Delhougne, Mike Ries, Martina Luysberg, Roger Loo

Journal:

Thin Solid Films

Année:

2006

Langue:

english

Fichier:

PDF, 308 KB

english, 2006

Contributions to understanding the optical properties of partially ordered (Al0.3Ga0.7)0.52In0.48P

R. Schmidt, M.v.d. Ahe, Ch. Dieker, D. Gauer, H. Hardtdegen, T. Hauck, M. Luysberg, D. Meertens, D. Schmitz

Journal:

Journal of Crystal Growth

Année:

1998

Langue:

english

Fichier:

PDF, 268 KB

english, 1998

Impact of beryllium dopants on the stability of LT-grown AlAs/GaAs:Be heterostructures against thermally activated intermixing

K Tillmann, M Luysberg, P Specht, E.R Weber

Journal:

Thin Solid Films

Année:

2003

Langue:

english

Fichier:

PDF, 625 KB

english, 2003

Properties of evaporated titanium thin films and their possible application in single electron devices

K. Hofmann, B. Spangenberg, M. Luysberg, H. Kurz

Journal:

Thin Solid Films

Année:

2003

Langue:

english

Fichier:

PDF, 591 KB

english, 2003

Microstructure of Nanocrystalline Yttria-Doped Zirconia Thin Films Obtained by Sol–Gel Processing

Benjamin Butz, Heike Störmer, Dagmar Gerthsen, Matthias Bockmeyer, Reinhard Krüger, Ellen Ivers-Tiffée, Martina Luysberg

Journal:

Journal of the American Ceramic Society

Année:

2008

Langue:

english

Fichier:

PDF, 1.69 MB

english, 2008

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany Volume 41B || Role of asymmetries for EMCD sum rules

Luysberg, Martina, Tillmann, Karsten, Weirich, Thomas

Année:

2008

Langue:

english

Fichier:

PDF, 261 KB

english, 2008

Structural properties of microcrystalline silicon in the transition from highly crystalline to amorphous growth

Houben, L., Luysberg, M., Hapke, P., Carius, R., Finger, F., Wagner, H.

Journal:

Philosophical Magazine A

Année:

1998

Langue:

english

Fichier:

PDF, 2.38 MB

english, 1998

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany Volume 486 || Extended field of view for medium resolution electron holography at Philips CM 200 Microscope

Luysberg, Martina, Tillmann, Karsten, Weirich, Thomas

Année:

2008

Langue:

english

Fichier:

PDF, 216 KB

english, 2008

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany Volume 248 || Low Loss BSE imaging with the EsB Detection system on the Gemini Ultra FE-SEM

Luysberg, Martina, Tillmann, Karsten, Weirich, Thomas

Année:

2008

Langue:

english

Fichier:

PDF, 203 KB

english, 2008

Highly textured zinc oxide films by room temperature ion beam assisted deposition

D. Köhl, M. Luysberg, M. Wuttig

Journal:

physica status solidi (RRL) - Rapid Research Letters

Année:

2009

Langue:

english

Fichier:

PDF, 259 KB

english, 2009

Microstructure evolution effects of helium redistribution in as-implanted silicon and Si0.8Ge0.2/Si heterostructues

M.J. Mörschbächer, D.L. da Silva, P.F.P. Fichtner, E. Oliviero, M. Behar, F.C. Zawislak, B. Holländer, M. Luysberg, S. Mantl, R. Loo, M. Caymax

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Année:

2004

Langue:

english

Fichier:

PDF, 360 KB

english, 2004

Microcrystalline silicon carbide window layers in thin film silicon solar cells

T. Chen, Y. Huang, A. Dasgupta, M. Luysberg, L. Houben, D. Yang, R. Carius, F. Finger

Journal:

Solar Energy Materials and Solar Cells

Année:

2012

Langue:

english

Fichier:

PDF, 1.36 MB

english, 2012

Pretreatment of glass substrates by Ar/O2 ion beams for the as-sputtered rough Al doped zinc oxide thin films

Wendi Zhang, Eerke Bunte, Martina Luysberg, Philipp Spiekermann, Florian Ruske, Jürgen Hüpkes

Journal:

Surface and Coatings Technology

Année:

2011

Langue:

english

Fichier:

PDF, 1.07 MB

english, 2011

Strain relaxation of pseudomorphic Si1−xGex/Si(1 0 0) heterostructures after hydrogen or helium ion implantation for virtual substrate fabrication

B. Holländer, St. Lenk, S. Mantl, H. Trinkaus, D. Kirch, M. Luysberg, T. Hackbarth, H.-J. Herzog, P.F.P. Fichtner

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Année:

2001

Langue:

english

Fichier:

PDF, 625 KB

english, 2001

Light-induced modification of a-SiOx II: Laser crystallization

Janotta, Andreas, Dikce, Yavuz, Schmidt, Matthias, Eisele, Christopher, Stutzmann, Martin, Luysberg, Martina, Houben, Lothar

Journal:

Journal of Applied Physics

Année:

2004

Langue:

english

Fichier:

PDF, 687 KB

english, 2004

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany Volume 388 || First performance measurements and application results of a new high brightness Schottky field emitter for HR-S/TEM at 80-300kV acceleration voltage

Luysberg, Martina, Tillmann, Karsten, Weirich, Thomas

Année:

2008

Langue:

english

Fichier:

PDF, 282 KB

english, 2008

ChemInform Abstract: Optimized Fabrication of High Quality La0.67Sr0.33MnO3 Thin Films Considering All Essential Characteristics

H. Boschker, M. Huijben, A. Vailionis, J. Verbeeck, S. van Aert, M. Luysberg, S. Bals, G. van Tendeloo, E. P. Houwman, G. Koster, et al. et al.

Journal:

ChemInform

Année:

2012

Fichier:

PDF, 19 KB

2012

Structural investigation and growth of 〈n〉-type microcrystalline silicon prepared at different plasma excitation frequencies

P. Hapke, M. Luysberg, R. Carius, M. Tzolov, F. Finger, H. Wagner

Journal:

Journal of Non-Crystalline Solids

Année:

1996

Langue:

english

Fichier:

PDF, 435 KB

english, 1996

Growth of microcrystalline nip Si solar cells: role of local epitaxy

L. Houben, C. Scholten, M. Luysberg, O. Vetterl, F. Finger, R. Carius

Journal:

Journal of Non-Crystalline Solids

Année:

2002

Langue:

english

Fichier:

PDF, 314 KB

english, 2002

Morphological and crystallographic defect properties of microcrystalline silicon: a comparison between different growth modes

L. Houben, M. Luysberg, P. Hapke, O. Vetterl, F. Finger, R. Carius, H. Wagner

Journal:

Journal of Non-Crystalline Solids

Année:

1998

Langue:

english

Fichier:

PDF, 575 KB

english, 1998

Growth of microcrystalline silicon using the layer-by-layer technique at various plasma excitation frequencies

O Vetterl, P Hapke, F Finger, L Houben, M Luysberg, H Wagner

Journal:

Journal of Non-Crystalline Solids

Année:

1998

Langue:

english

Fichier:

PDF, 538 KB

english, 1998

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany || Four-dimensional STEM-EELS Tomography

Luysberg, Martina, Tillmann, Karsten, Weirich, Thomas

Année:

2008

Langue:

english

Fichier:

PDF, 389 KB

english, 2008

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany || Optimum operation of Schottky electron sources: brightness, energy spread and stability

Luysberg, Martina, Tillmann, Karsten, Weirich, Thomas

Année:

2008

Langue:

english

Fichier:

PDF, 367 KB

english, 2008

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany || The Detective Quantum Efficiency of Electron Area Detectors

Luysberg, Martina, Tillmann, Karsten, Weirich, Thomas

Année:

2008

Langue:

english

Fichier:

PDF, 211 KB

english, 2008